Index,Address,ID,Description
10240,2800,PLC_ERROR_CODE,PLC ¿¡·¯ ÄÚµå
10241,2801,PLC_PAGE_NO,¼³Á¤ÇÒ PLC Recipe ¹øÈ£
10242,2802,-,-
10243,2803,-,-
10244,2804,-,-
10245,2805,-,-
10246,2806,-,-
10247,2807,-,-
10248,2808,-,-
10249,2809,-,-
10250,280A,-,-
10251,280B,-,-
10252,280C,-,-
10253,280D,-,-
10254,280E,-,-
10255,280F,-,-
10256,2810,PLC_CELL_ID,PLC ¼¿ ID
10257,2811,-,-
10258,2812,PLC_LOT_ID,PLC ¶ù ID
10259,2813,-,-
10260,2814,-,-
10261,2815,-,-
10262,2816,PLC_PARAM_1,-
10263,2817,¡¦,-
10264,2818,PLC_PARAM_40,-
10265,2819,,
10266,281A,,
10267,281B,,
10268,281C,,
10269,281D,,
10270,281E,,
10271,281F,,
10272,2820,,
10273,2821,,
10274,2822,,
10275,2823,,
10276,2824,,
10277,2825,,
10278,2826,,
10279,2827,,
10280,2828,,
10281,2829,,
10282,282A,,
10283,282B,,
10284,282C,,
10285,282D,,
10286,282E,,
10287,282F,,